北京科技大学学报2000，Vol.22Issue(3)：259-261,3.
CVD金刚石薄膜的织构分析
Texture Analysis of CVD Diamond Thin Films
摘要
Abstract
Different textures of CVD diamond thin films are analyzed using the methods of pole figure and orientation distribution function. It is shown that the higher multiplicity leads to the higher appearance possibility of{110}fiber texture. The formation mechanism of{221}fiber texture by means of twinning effect is discussed.The importance of the systematic investigation on the relationship between textures and properties is emphasized, and the advanced methods for texture analysis are recommended.关键词
金刚石薄膜/面织构/化学气相沉积/织构生成Key words
diamond thin film/fiber texture/CVD/texture formation分类
通用工业技术引用本文复制引用
毛卫民,陈楠..CVD金刚石薄膜的织构分析[J].北京科技大学学报,2000,22(3):259-261,3.基金项目
国家“863”工程重点自主课题（No.863-715-Z3803) （）
