中国电子科技2007，Vol.5Issue(3)：278-282,5.
Total Sensitivity Index Calculation of Tool Requirement Model via Error Propagation Equation
Total Sensitivity Index Calculation of Tool Requirement Model via Error Propagation Equation
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作者信息
- 1. School of Mechatronic Engineering, University of Electronic Science and Technology of China, Chengdu, 610054, China;School of Mechatronic Engineering, University of Electronic Science and Technology of China, Chengdu, 610054, China
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摘要
Abstract
A new and convenient method is presented to calculate the total sensitivity indices defined by variance-based sensitivity analysis. By decomposing the output variance using error propagation equations, this method can transform the "double-loop" sampling procedure into "single-loop" one and obviously reduce the computation cost of analysis. In contrast with Sobol's and Fourier amplitude sensitivity test (FAST) method, which is limited in non-correlated variables, the new approach is suitable for correlated input variables. An application in semiconductor assembling and test manufacturing (ATM) factory indicates that this approach has a good performance in additive model and simple non-additive model.关键词
Error propagation, total sensitivity index, variance-based sensitivity analysis.Key words
Error propagation, total sensitivity index, variance-based sensitivity analysis.分类
信息技术与安全科学引用本文复制引用
..Total Sensitivity Index Calculation of Tool Requirement Model via Error Propagation Equation[J].中国电子科技,2007,5(3):278-282,5.
