无机材料学报2000,Vol.15Issue(2):287-292,6.
Sol-Gel法制备 BaxSr1-xTiO3铁电薄膜化学机制的探讨
Studies on the Chemical Mechanism of BaxSr1-xTiO3 Ferroelectric Thin Films by Sol-Gel Method
摘要
Abstract
FTIR analysis combined with DSC, XRD and AFM experiments was used to study on the chemical mechanism of thermal evolution for BaxSr1-xTiO3 (BST) thin films derived by sol-gel method. Acetylacetone(HAcAc) was introduced as a chelating agent to reduce a rapid hydrolysis rate of Ti-alkoxide, to improve its crystallization path, to decrease its 奵rystallization temperature. And then the densified and crack-free BST thin films with better crystallization were fabricated.关键词
BST薄膜/sol-gel工艺/FTIR/DSC/XRD/AFMKey words
BST thin films/sol-gel method/FTIR/DSC/XRD/AFM分类
数理科学引用本文复制引用
金承钰,丁永平,孟中岩..Sol-Gel法制备 BaxSr1-xTiO3铁电薄膜化学机制的探讨[J].无机材料学报,2000,15(2):287-292,6.基金项目
国家自然基金资助项目(59572038) (59572038)