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利用流动催化法在减压化学气相沉积系统中制备碳纳米管粉末

李艳楠 孙卓 陈岳 张哲娟 王莉莉 陈婷 陈奕卫 杨介信

液晶与显示2007,Vol.22Issue(3):288-293,6.
液晶与显示2007,Vol.22Issue(3):288-293,6.

利用流动催化法在减压化学气相沉积系统中制备碳纳米管粉末

Producing Carbon Nanotube Powder in a Floating Iron Catalyst LPCVD System

李艳楠 1孙卓 1陈岳 1张哲娟 1王莉莉 1陈婷 1陈奕卫 1杨介信2

作者信息

  • 1. 华东师范大学纳光电集成与先进装备教育部工程研究中心,上海200062
  • 2. 上海芯光科技有限公司,上海200062
  • 折叠

摘要

Abstract

Large amounts of web-like CNTs were synthesized in a large scale in a floating iron catalyst chemical vapor deposition system below atmospheric pressure,using ferrocene as a catalyst precursor,cyelohexane as carbon source,H2 as carrier gas,a certain molar ratio of C4 H4 S to C6 H12 of thiophene as a promoter,and H2 flow rate of 60 mL/min,under the pressure of 15 kPa.reaction temperature of 650℃.The effect of ferrocene sublimed temperature on the growth of carbon products was studied.It is found that the quantity of the CNTs were enhanced with the increase of the ferrocene amount while the quality of the CNTS became worse on the contrary.Meanwhile,the molar ratio of C4 H4 S to C6 H12 also has a evident effect on the morphology and quality of the CNTs.Scanning electron microscopy(SEM),Raman spectroscopy were utilized to characterize the samples.

关键词

碳纳米管/硫颗粒的影响/二茂铁的催化温度

Key words

CNTs/sulfur effect/ferrocene sublimed temperature

分类

信息技术与安全科学

引用本文复制引用

李艳楠,孙卓,陈岳,张哲娟,王莉莉,陈婷,陈奕卫,杨介信..利用流动催化法在减压化学气相沉积系统中制备碳纳米管粉末[J].液晶与显示,2007,22(3):288-293,6.

基金项目

Supported by Shanghai Science Technology Committee(No.0652nm033) (No.0652nm033)

Key Project of EXPO Plan(No.05dz05803):National Nature Science Foundation of China(No.60477003) (No.05dz05803)

液晶与显示

OA北大核心CSCDCSTPCD

1007-2780

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