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一种估算热导率的方法

罗廷礼 张永贵 何奇宇 王志娜 蔡云虹 郭辉 孙振路

人工晶体学报2000,Vol.29Issue(3):296-299,4.
人工晶体学报2000,Vol.29Issue(3):296-299,4.

一种估算热导率的方法

A Method of Estimating Thermal Conductivity

罗廷礼 1张永贵 1何奇宇 1王志娜 1蔡云虹 1郭辉 1孙振路1

作者信息

  • 1. 河北省科学院中试基地,石家庄050081
  • 折叠

摘要

Abstract

The radial thermal conductivity is important specification of diamond films. This paper reported the method of estimating the radial thermal conductivity of D C arc jet CVD diamond films through analyzing the correlation between the radial thermal conductivity and the peak value of X-ray diffraction spectrum of the crystal face. It is required that the CPS of (220) and (311) in three-orientation films with main crystal direction (111) are 23-33% and 8-15%, or the CPS of (400) in four-orientation films is as low as 5%. The range of error value is from -9.5% to 3.5%. When the CPS of (220) is high or the CPS of (311) is low, the estimating results are easy to be more than measurement, and vice verse.

关键词

金刚石膜/晶体取向/X射线晶体衍射谱/热导率

Key words

diamond films/crystal orientation/X-ray diffraction spectrum/thermal conductivity

分类

数理科学

引用本文复制引用

罗廷礼,张永贵,何奇宇,王志娜,蔡云虹,郭辉,孙振路..一种估算热导率的方法[J].人工晶体学报,2000,29(3):296-299,4.

基金项目

河北省自然科学基金资助项目 ()

人工晶体学报

OA北大核心CSCDCSTPCD

1000-985X

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