人工晶体学报2000,Vol.29Issue(3):296-299,4.
一种估算热导率的方法
A Method of Estimating Thermal Conductivity
摘要
Abstract
The radial thermal conductivity is important specification of diamond films. This paper reported the method of estimating the radial thermal conductivity of D C arc jet CVD diamond films through analyzing the correlation between the radial thermal conductivity and the peak value of X-ray diffraction spectrum of the crystal face. It is required that the CPS of (220) and (311) in three-orientation films with main crystal direction (111) are 23-33% and 8-15%, or the CPS of (400) in four-orientation films is as low as 5%. The range of error value is from -9.5% to 3.5%. When the CPS of (220) is high or the CPS of (311) is low, the estimating results are easy to be more than measurement, and vice verse.关键词
金刚石膜/晶体取向/X射线晶体衍射谱/热导率Key words
diamond films/crystal orientation/X-ray diffraction spectrum/thermal conductivity分类
数理科学引用本文复制引用
罗廷礼,张永贵,何奇宇,王志娜,蔡云虹,郭辉,孙振路..一种估算热导率的方法[J].人工晶体学报,2000,29(3):296-299,4.基金项目
河北省自然科学基金资助项目 ()