厦门大学学报（自然科学版）2001，Vol.40Issue(2)：297-302,6.
MEMS系统级仿真建模理论与方法的研究
On The Modeling Methodology of MEMS System-Level Simulation
孙道恒 1黄元庆 1郑炜 1朱立秒 1李文望1
作者信息
摘要
Abstract
MEMS CAD, by which the simulation of MEMS design, manufacture and operation
all can be realized, is the significant foundation of its merchandise. The system-level simulation is one of the critical phases. In the paper, the hierarchy of the MEMS CAD, the modeling method ology of the NODAS and the Black-Box for system-level simulation is introduced. The modeling methodology based on the MWR (Method of Weighted Residuals), which may be the uniform modeling method of MEMS system-level simulation, is proposed.
关键词
微机电系统(MEMS)/耦合场计算/系统级仿真分类
机械制造引用本文复制引用
孙道恒,黄元庆,郑炜,朱立秒,李文望..MEMS系统级仿真建模理论与方法的研究[J].厦门大学学报（自然科学版）,2001,40(2):297-302,6.
