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Ba0.9Sr0.1TiO3薄膜的椭偏光谱研究

阳生红 李辉遒 张曰理 莫党 田虎永 罗维根 蒲兴华 丁爱丽

无机材料学报2001,Vol.16Issue(2):305-310,6.
无机材料学报2001,Vol.16Issue(2):305-310,6.

Ba0.9Sr0.1TiO3薄膜的椭偏光谱研究

Spectroscopic Ellipsometry Studies of Ba0.9Sr0.1TiO3 Thin Films

阳生红 1李辉遒 1张曰理 1莫党 1田虎永 2罗维根 2蒲兴华 2丁爱丽2

作者信息

  • 1. 中山大学物理系,
  • 2. 中国科学院上海硅酸盐研究所
  • 折叠

摘要

Abstract

Ellipsometric spectra of Ba0.9Sr0.1TiO3(BST)thin films with various annealing tem-peratures were measured in the range of photon energy from 2.1 to 5.2eV.Constructing appropriate fitting models and describing optical properties of the BST with Cauchy dispersion model,their optical constants (refractive index n and extinction coefficient k) spectra and band gap Eg were determined by means of an optimization.Compared these results,we obtained the variation of the refractive index n,the extinction coefficient k and the band gap Eg with annealing temperatures.

关键词

椭偏光谱/光学常数谱/BST薄膜

分类

数理科学

引用本文复制引用

阳生红,李辉遒,张曰理,莫党,田虎永,罗维根,蒲兴华,丁爱丽..Ba0.9Sr0.1TiO3薄膜的椭偏光谱研究[J].无机材料学报,2001,16(2):305-310,6.

无机材料学报

OA北大核心CSCDSCI

1000-324X

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