电子器件2008，Vol.31Issue(1)：308-311,4.
硅微通道板像增强器的研究
Study on Silicon Microchannel Plate Image Intensifier
王国政 1李野 1高延军 1姜德龙 1付申成 1吴奎 1端木庆铎1
作者信息
摘要
Abstract
Microchannel plate (MCP) is an image intensifier widely used for detecting and imaging of the e-lectrons, ions, UV radiation, and soft X-ray fluxes. The traditional preparation of MCP is a process of glass fiber drawing and hydrogen reduction. A new method for fabricating MCP was proposed and studied.A silicon MCP was prepared based on bulk-micromachining technology, dry etching technology and elec-trochemical process respectively. In dry etching, a Si-MCP with 15-30 aspect ratio of the microchannel,6～20 μm dimension of pore, 4～8 μm space were prepared by Inductively Coupled Plasma (ICP). The e-lectron gain for the sample of aspect ratio of 16 was about 102. In wet process, both p-type and n-type sili-con was selected as the substrate for MCP. The electrochemical mechanism of silicon anisotropy etching were investigated and discussed. The results shows that the high aspect ratio of silicon microchannel arrays can be made by both dry and wet etching processes. The electrochemical process for silicon microchannel arrays has lower cost than ICP process.关键词
微通道板/微加工/刻蚀/硅/像增强器Key words
Microchannel plate/ Micromachining/ Eching/ Silicon/ Image Intensifier分类
信息技术与安全科学引用本文复制引用
王国政,李野,高延军,姜德龙,付申成,吴奎,端木庆铎..硅微通道板像增强器的研究[J].电子器件,2008,31(1):308-311,4.
