哈尔滨工业大学学报（英文版）2003，Vol.10Issue(4)：371-375,5.
Modeling for integrated micromanipulator
Modeling for integrated micromanipulator
摘要
Abstract
According to the principle of a piezoelectric scanner, a three degree-of-freedom (D. O. F) micromanipulator driven by piezoelectric tubes was developed to realize the integration of mechanism and actuator.Through the static analysis of the deflection of piezoelectric tube into four quadrants, a formula has been establish for the relationship between micro-displacement and driving voltage and accordingly, the angular error is analyzed. Experiments show that the micro-displacement calculated using the formula is in good agreement with the measurements. The relative error is less than 5%. Some performances of the micromanipulator show that it can be applied to some micromanipulations.关键词
micromanipulator/piezoelectric scanner/piezoelectric tube/modelingKey words
micromanipulator/piezoelectric scanner/piezoelectric tube/modeling分类
信息技术与安全科学引用本文复制引用
荣伟彬,曲东升,孙立宁,楼朝飞,蔡鹤皋..Modeling for integrated micromanipulator[J].哈尔滨工业大学学报（英文版）,2003,10(4):371-375,5.基金项目
Sponsoned by the Scientific Research Foundation of Harbin Institute of Technology( Grant No. HIT. 2001.09). （ Grant No. HIT. 2001.09）
