光学精密工程2004，Vol.12Issue(4)：380-385,6.
软X射线多层膜设计中表面粗糙度对反射率的影响
Roughness effects on the reflectance in the design of a soft X-ray multi-layer mirror
摘要
Abstract
In the design of a multi-layer mirror at λ=1.03 nm in soft X-ray regin, a modified method is presented, in which the effects of root-mean-square (rms) roughness of the substrate and interfaces between these films on the reflectance are considered and discussed. Then, the mathematical model for rough interfaces is given based on the scattering theory presented by D. G. Stearns. The design result shows that the substrate roughness (rms) should be smaller than 0.6 nm in order to fabricate a multi-layer mirror whose reflectance is greater than 10%. A few super-polished fused quartz substrates with 0.5 nm (rms) roughness are chosen in coating experiments. The measured reflectance is about 10% at λ=1.03 nm,which is consistent with the result acquired by the modified design method. The multi-layer mirror has been applied in a X-ray spectrograph for diagnosis of inertial confinement fusion (ICF).关键词
粗糙度/反射率/多层膜Key words
roughness/reflectance/multi-layer mirror分类
数理科学引用本文复制引用
胡家升,宋利民..软X射线多层膜设计中表面粗糙度对反射率的影响[J].光学精密工程,2004,12(4):380-385,6.基金项目
The project is supported by 863(No.863-416-03) （No.863-416-03）
