电子器件2008，Vol.31Issue(2)：385-388,4.
CIF格式转换为PG3600格式中任意多边形切割成矩形的算法研究
Partitioning Algorithm for the Pattern Conversion of CIF into PG3600
摘要
Abstract
This paper presents a novel algorithm for dividing the microlithography patterns of CIF format into rectangles of PG3600 format with emphasis on the division of arbitrary polygon into rectangles.The comparison result of this algorithm with other pattern division algorithms shows its great superiority for ir-regular polygons division over the other algorithms or techniques.关键词
CIF Format/PG3600 Format/pattern division/data format conversion/division along the SidesKey words
CIF Format/PG3600 Format/pattern division/data format conversion/division along the Sides分类
信息技术与安全科学引用本文复制引用
李金儒,陈宝钦,刘明,赵珉..CIF格式转换为PG3600格式中任意多边形切割成矩形的算法研究[J].电子器件,2008,31(2):385-388,4.基金项目
国家自然科学基金资助(60236010,90207004,60290081,90401002,60276019) （60236010,90207004,60290081,90401002,60276019）
自然科研基金项目资助(G2000036504,2002CB31190,2002AA325040) （G2000036504,2002CB31190,2002AA325040）
