中山大学学报(自然科学版)2007，Vol.46Issue(z1)：39-40,2.
中频磁控溅射法制备氧化锌钇薄膜及其性能研究
Study on the Preparation of ZYO Thin Films by Middle Frequency Alternative Magnetron Sputtering and Their Properties
孙若男 1庄大明 1张弓1
作者信息
- 1. 清华大学,机械工程系,北京,100084
- 折叠
摘要
Abstract
Y-doped zinc oxide(ZYO)thin films were prepared by middle frequency alternative magnetron sputtering on glass substrates with ZYO ceramic targets. The influences of Y2O3 content and substrate temperature on microstructures, optical and electrical properties of the thin films have been investigated. The results show that the ZYO films are of the structure of wurtzite type with high c-axis orientation. The lowest resistivity of the films in this work is 1.18×10-3Ωcm with the transmittance of over 80% at the visible region.关键词
ZYO/磁控溅射/透明导电薄膜/透过率/电阻率Key words
ZYO/ magnetron sputtering/ transparent conductive film/ transmittance/ resistivity分类
动力与电气工程引用本文复制引用
孙若男,庄大明,张弓..中频磁控溅射法制备氧化锌钇薄膜及其性能研究[J].中山大学学报(自然科学版),2007,46(z1):39-40,2.
