东南大学学报（自然科学版）2000，Vol.30Issue(6)：39-43,5.
高gn值悬臂梁式硅微加速度传感器的结构设计
Structure Design of High gn-Force Cantilever Beam Silicon Piezoresistive Accelerometers
摘要
Abstract
Using FEM numerical simulation, the stress distribution and resonance frequency are pre sented for different structure dimensions to equal cross-section and non-equal cross-section cantilever beam of silicon piezoresistive accelerometers. Analysis and numerical calculation of sensitivity to equal cross-section and non-equal section cantilever beam are completed, the results show that the sensitivity of non-equal cross-section cantilever beam can be improved about 30 percent. To optimized structural di mensions of cantilever betam, the range of acceleration is greater than 10 000 gn, lateral sensitivity can be neglected, over-load ability is satisfactory.关键词
悬臂梁/压阻式加速度计/结构设计Key words
cantilever beam/piezoresistive accelerometer/structure design分类
机械制造引用本文复制引用
席占稳,赖百坛..高gn值悬臂梁式硅微加速度传感器的结构设计[J].东南大学学报（自然科学版）,2000,30(6):39-43,5.基金项目
国防预研基金资助项目． （）
