光学精密工程2005，Vol.13Issue(4)：403-412,10.
Optical broadband monitoring of thin film growth
Optical broadband monitoring of thin film growth
摘要
Abstract
This contribution is focused on applications of spectroscopic methods for the precise control of deposition processes. In this context, the present study gives a review on selected combinations of conventional and ion deposition techniques with different broadband online spectrophotometric systems. Besides two systems operating in the VIS- and NIR-spectral range in combination with ion processes, also a monochromator system developed for conventional deposition processes in the DUV/VUV-spectral range will be discussed. The considerations will be concluded by a comparison of the major advantages of the specific combinations of processes with online monitoring concepts and by a brief outlook concerning future challenges.关键词
optical coating/optical broadband monitoring/ion assisted deposition/ion beam sputtering/DUV/VUVKey words
optical coating/optical broadband monitoring/ion assisted deposition/ion beam sputtering/DUV/VUV分类
数理科学引用本文复制引用
H.Ehlers,T.Groβ,M.Lappschies,D.Ristau..Optical broadband monitoring of thin film growth[J].光学精密工程,2005,13(4):403-412,10.基金项目
The authors thank the German Federal Ministry of Economics and Labour (BMWA) for the financial support of the research project "IntIon" under contract No. 16IN0088 within the framework of the "InnoNet" program. The support of the German Ministry for Science and Education (project "RAPIDOS") and the European Commission (TMR-network UV-coatings, contract-No. ERBFMRX-CT97-0101) is also acknowledged. （BMWA）
