半导体学报2001，Vol.22Issue(4)：409-412,4.
RCE光电探测器顶部DBR的优化
Optimization for Top DBR’s Reflectivity in RCE Photodectector
梁琨 1陈弘达 1邓晖 1杜云 1唐君 1吴荣汉1
作者信息
摘要
Abstract
The monolithic integration of vertical-cavity surface-emitting lasers (VCSEL) with photodetectors is very important in the application of free-space optical interconnects.Theoretical and experimental results on the resonant-cavity-enhanced (RCE) photodetector with VCSEL Structure are presented.The compatible requirement in input mirror reflectivity between the VCSEL and the RCE detector is achieved by precisely etching the top mirror.In this way,the RCE detector with relatively high quantum efficiency and necessary optical bandwidth has been obtained.关键词
垂直腔面发射激光器（VCSEL）/谐振腔增强型（RCE）光电探测器/分布式布拉格反射镜（DBR）/自由空间光互连（FSOI）分类
信息技术与安全科学引用本文复制引用
梁琨,陈弘达,邓晖,杜云,唐君,吴荣汉..RCE光电探测器顶部DBR的优化[J].半导体学报,2001,22(4):409-412,4.
