半导体学报2008，Vol.29Issue(3)：428-432,5.
一种新型电容式压力传感器
A Novel Capacitive Pressure Sensor
摘要
Abstract
A novel capacitive pressure sensor is presented,whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etching combined with adhesive bonding, and only three masks were used during the process. Sensors with side lengths of 1000,1200, and 1400μm were fabricated,showing sensitivity of 1.8,2.3, and 3.6fF/hPa over the range of 410～1010hPa, respectively. The sensi- tivity of the sensor with a side length of 1500μm is 4. 6fF/hPa,the nonlinearity is 6.4% ,and the max hysteresis is 3.6%. The results show that permittivity change plays an important part in the capacitance change.关键词
电容式压力传感器/电致伸缩/pn结自停止腐蚀/粘结剂键合/线性度Key words
capacitive pressure senor/ electrostriction/ pn junction self-stop etching/ adhesive bonding/ linearity分类
信息技术与安全科学引用本文复制引用
黄晓东,黄见秋,秦明,黄庆安..一种新型电容式压力传感器[J].半导体学报,2008,29(3):428-432,5.基金项目
国家自然科学基金重点项目资助(批准号:90607002) Project supported by the Key Program of the National Natural Science Foundation of China (No. 90607002) （批准号:90607002）
