四川大学学报（自然科学版）2000，Vol.37Issue(3)：454-458,5.
离子束轰击钨合金表面碳膜的AES和XPS分析
INVESTIGATION OF AES AND XPS FOR THE ION BOMBARDED CARBON FILMS ON THE SURFACE OF TUNGSTEN ALLOY
李俊 1高剑 1张一云 1吴丽萍 1黄宁康 2赵纯培3
作者信息
- 1. 四川大学物系，成都610064
- 2. 四川大学原子核科学技术研究所，成都610064
- 3. 四川大学分析测试中心，成都610064
- 折叠
摘要
Abstract
Tungsten alloy with special properties is a useful material in medical and weapon devices. Surface modification of ion technique is used to improve the surface hardness and wear resistance of tungsten alloy, where carbon films deposited with magnetron sputtering on the surface of tungsten alloy were bombarded by ion beam with different species AES and XPS analyses for these speciment show that tungsten carbide and tungsten nitride were formed due to N+ bombardment. Which is beneficial to the Surface hardness and wear resistance of tungsten alloy,but no carbide or no nitride as above with other ion species. Again,ion bombardness leads to mixing between the carbon and tungsten alloy hence improve the adhere of carbon film to the substrate.关键词
tungsten alloy/carbon film/ion bombardment/AES/XPSKey words
tungsten alloy/carbon film/ion bombardment/AES/XPS引用本文复制引用
李俊,高剑,张一云,吴丽萍,黄宁康,赵纯培..离子束轰击钨合金表面碳膜的AES和XPS分析[J].四川大学学报（自然科学版）,2000,37(3):454-458,5.
