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Optical Design for the Off-axis Reflective Optics with Wide Field

光学精密工程2001,Vol.9Issue(5):483-486,4.
光学精密工程2001,Vol.9Issue(5):483-486,4.

Optical Design for the Off-axis Reflective Optics with Wide Field

Optical Design for the Off-axis Reflective Optics with Wide Field

1

作者信息

  • 1. The State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences,;Changchun Institute of Optics and Fine Mechanics,;The State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences,;Changchun Institute of Optics and Fine Mechanics,;The State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences,;The State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences,
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摘要

Abstract

Reflective optics with wide field of view has been applied more and more widely in EUVL or space optics, and also plays an important role in promoting scientific and technological research. Among the reflective optics, the off-axis reflective optics is the most hopeful solution to the ever-highest demands of these applications. This paper gives the requirements of both the above mentioned applications and the similarities and differences between these two kinds of optical systems. Finally, a design example of off-axis reflective optics with wide field of view is presented and described.

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..Optical Design for the Off-axis Reflective Optics with Wide Field[J].光学精密工程,2001,9(5):483-486,4.

光学精密工程

OACSCD

1004-924X

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