东南大学学报（英文版）2008，Vol.24Issue(4)：487-491,5.
硅微陀螺仪正交误差和失调误差抑制线路
Quadrature error and offset error suppression circuitry for silicon micro-gyroscope
杨波 1周百令 1王寿荣1
作者信息
- 1. 东南大学仪器科学与工程学院,南京,210096
- 折叠
摘要
Abstract
The reasons for inducing quadrature error and offset error are analyzed and the expressions of quadrature error and offset error are induced. The open-loop system analysis indicates that, in order to avoid the appearance of harmonic peaks, the frequency difference δf between drive mode and sense mode must be less than 1/(2Qy ). In order to eliminate the effects of the quadrature error and the offset error, as well as the inherent non-linearity in the capacitance-type sensors, a closed-loop feedback control circuit with quadrature correction is designed. The experimental results indicate that the quadrature error and offset error are corrected. By comparing with open-loop detection, the closed-loop feedback control circuit with quadrature correction decreases the non-linearity of the scale factor from 16. 02% to 0. 35%, widens the maximum rate capability from ±270 (°)/s to ± 370 (°)/s and increases the stability of zero bias from 155. 2 (°)/h to 60. 6 (°)/h.关键词
硅微陀螺仪/正交误差/失调误差/闭环反馈/零偏稳定性Key words
silicon micro-gyroscope (SMG)/quadrature error/offset error/closed-loop feedback/stability of zero bias分类
交通工程引用本文复制引用
杨波,周百令,王寿荣..硅微陀螺仪正交误差和失调误差抑制线路[J].东南大学学报（英文版）,2008,24(4):487-491,5.
