光学精密工程2005，Vol.13Issue(4)：487-491,5.
A hybrid algorithm for reengineering the refractive index profile of inhomogeneous coatings from optical in-situ broadband monitoring data
A hybrid algorithm for reengineering the refractive index profile of inhomogeneous coatings from optical in-situ broadband monitoring data
S.Wilbrandt 1O.Stenzel 2D.G(a¨)bler 2N.Kaiser2
作者信息
- 1. Friedrich-Schiller-Universitt Jena,Institut für Angewandte Physik,Max-Wien-Platz 1,07743 Jena,Germany
- 2. Fraunhofer-Institut für Angewandte Optik und Feinmechanik,Albert-Einstein-Str.7,D-07745 Jena,Germany
- 折叠
摘要
Abstract
Reengineering the refractive index profile of inhomogeneous coatings is a troublesome task. Multiplicity of solutions may significantly reduced by providing additional information. For this reason an in-situ broadband monitoring system was developed to measure the transmittance of the growing film directly at the rotating substrate. For characterization of these coatings, a new model was developed, which significantly reduces the number of parameters. The refractive index profile may be described by a proper number of equally spaced volume fraction values using the Bruggeman effective media approach. A good initial approximation of the refractive index profile can be generated based on deposition rates for both materials recorded with quartz crystal monitor during manufacturing. During the optimization process, a second order minimization algorithm was used to vary the refractive index profile of the whole coating and film thickness of the intermediate stages. Finally, a significantly improved accuracy of the modelled transmittance was achieved.关键词
inhomogenenous coating/refractive index profile/broadband monitoring/hybrid algorithmKey words
inhomogenenous coating/refractive index profile/broadband monitoring/hybrid algorithm分类
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S.Wilbrandt,O.Stenzel,D.G(a¨)bler,N.Kaiser..A hybrid algorithm for reengineering the refractive index profile of inhomogeneous coatings from optical in-situ broadband monitoring data[J].光学精密工程,2005,13(4):487-491,5.
