光学精密工程2005，Vol.13Issue(4)：492-499,8.
A novel absorptive thin film for laser welding in optoelectronic device capsulation
A novel absorptive thin film for laser welding in optoelectronic device capsulation
摘要
Abstract
A kind of absorptive thin film was designed and used in laser welding of SiO2, Si and LiNbO3. This absorptive thin film of three-layer metal-dielectric-metal structure is designed for further reducing the high reflectance of the Nd:YAG laser beam on the surface of the tin layer that is utilized as solder between the transparent parent materials. The actual absorption of laser energy in experiment exceeds 99%. This combination of absorber and solder transformed the laser energy into heat efficiently and decreased the minimum necessary incident laser power transmitting through the transparent parent materials. As a result, the damage of the parent materials, which is suffered from laser transmission, was avoided; On the other hand, mechanical stability of the welded materials had been improved. Experiment had been made to show the difference between welding with and without the absorptive thin film.关键词
absorber/absorptive thin films/laser welding/wave-guide/optical components/MEMSKey words
absorber/absorptive thin films/laser welding/wave-guide/optical components/MEMS分类
数理科学引用本文复制引用
JIANG Shao-ji,JIN Tao,LI Wei-duo,WANG He-zhou..A novel absorptive thin film for laser welding in optoelectronic device capsulation[J].光学精密工程,2005,13(4):492-499,8.基金项目
This research was greatly supported by Hanslaser Ltd. The experiment was carried out fluently with the support of the welding equipments provided by Hanslaser and the kind effort of the engineers in Hanslaser. This research was supported by Hanslaser Ltd, National 863 (2003AA311022) Project of China and National 973 (2003CB314901) Project of China. （2003AA311022）
