材料科学与工程2000，Vol.18Issue(4)：49-52,4.
紫外脉冲激光淀积法制备Pb(Ta0.05Zr0.48Ti0.47)O3薄膜的铁电性质
Ferroelectric Properties of Pb (Ta0.05Zr0.48Ti0.47)O3 Films Prepared by Pulsed Laser Deposition
朱敏 1殷江 2刘治国2
作者信息
- 1. 镇江师专物理系，江苏 镇江 212003
- 2. 南京大学固体微结构物理国家重点实验室，江苏 南京 210093
- 折叠
摘要
Abstract
The heterostructures of La1-xSrxCoO3/Pb (Ta0.05Zr0.48Ti0.47)O3(PTZT)/La1-xSrxCoO3
have been deposited on Pt/TiO2/SiO2/Si(001) substrates by pulsed laser deposition. It was observed that PTZT films were mainly oriented along (001)-direction. The ferroelectric capacitor La1-xSrxCoO3/Pb(Ta0.05Zr0.48Ti0.47)O3(PTZT)/La1-xSrxCoO3 retained its polarization as about 96％ of its initial value after 5×1010 switching cycles at an applied voltage 5 V and a frequency 500kHz. SEM cross-sectional morphology of the heterostructures and RBS backscattering spectrum showed that no obvious interdiffusion exist on the inter face.关键词
脉冲激光淀积/铁电薄膜/疲劳特性Key words
pulsed laser deposition/ferroelectric film分类
通用工业技术引用本文复制引用
朱敏,殷江,刘治国..紫外脉冲激光淀积法制备Pb(Ta0.05Zr0.48Ti0.47)O3薄膜的铁电性质[J].材料科学与工程,2000,18(4):49-52,4.
