东南大学学报（英文版）2007，Vol.23Issue(4)：520-523,4.
热驱动式RF MEMS开关设计
RF MEMS switches based on thermal actuator
黄继伟 1王志功1
作者信息
- 1. 东南大学射频与光电集成电路研究所,南京,210096
- 折叠
摘要
Abstract
A new switching circuit is presented for the application in the frequency range of 0 to 8 GHz. This switch is electro-thermally actuated and exhibits high radio frequency (RF) performance due to its lateral contact mechanism. It composes of electroplated nickel and silicon nitride as structural materials. The isolation between bias and signal ports is realized by using silicon nitride. In the case of a small deformation, the relation between the displacement of the vertex and the pre-bending angle is analyzed. The metal contact is realized by in-plane motion and sidewall connection. The switches were fabricated using the MetalMUMPs process from MEMSCAP. The RF testing results show that the switch has a low insertion loss of 0. 9 dB at 8 GHz and a high isolation of 30 dB below 8 GHz.关键词
射频微机电系统/热驱动器/横向接触/隔离Key words
RF MEMS (radio frequency micro-electro-mechanical systems)/thermal actuator/lateral contact/isolation分类
信息技术与安全科学引用本文复制引用
黄继伟,王志功..热驱动式RF MEMS开关设计[J].东南大学学报（英文版）,2007,23(4):520-523,4.
