长春邮电学院学报2000，Vol.18Issue(2)：5-7,3.
退火对Ti离子注入LiNbO3光波导的影响
Effects of annealing on Ti-implantation LiNbO3 optical waveguide
摘要
Abstract
Low loss LiNbO3 optical waveguide fabricated by ion implantation technology on high quality LiNbO3 crystal is reported, and its scattering spectrum is measured and analyzed. A feasible way is provided for solving transverse diffusion of optical waveguide.关键词
离子注入/介质光波导/退火Key words
Ion implantation/Dielectric optical waveguides/Annealing分类
信息技术与安全科学引用本文复制引用
刘大力,李公羽,何晓东,鲁平..退火对Ti离子注入LiNbO3光波导的影响[J].长春邮电学院学报,2000,18(2):5-7,3.基金项目
国家自然科学基金资助项目(69508005) （69508005）
