东南大学学报（英文版）2009，Vol.25Issue(1)：57-62,6.
硅基电感模型中衬底涡流效应和分布效应分析
Analysis of substrate eddy effects and distribution effects in silicon-based inductor model
摘要
Abstract
The concepts of substrate eddy influence factor and distribution-effects-occurring frequency are presented.The effects of substrate resistivity and inductor spiral length on the substrate eddy and distribufion effects are captured.The substrate eddy lnfluence factors of an inductor(6 turn,3 060 μm in length)silicon substrates are 0.3 and 0.04.and the distribution-effects-occurring frequencies are 1.8 GHz and 14.5 GHz.respectively.The measurement results show that the equivalent circnit model Of the indactor on low resistivity silicon must take into consideration substrate eddy effects and distribufion effects.However.the circuit model of the inductor on high resistivity silicon cannot take into account the substrate eddy effects and the distribufion effects at the frequencies of interest.Its simple model shows agreement with the measurements,and the contrast is within 7%.关键词
平面电感/衬底涡流效应/分布效应/等效电路模型Key words
planar spiral inductors/substrate eddy effects/distribufion effects/equivalent circuit model分类
信息技术与安全科学引用本文复制引用
武锐,廖小平,张志强,杨乐..硅基电感模型中衬底涡流效应和分布效应分析[J].东南大学学报（英文版）,2009,25(1):57-62,6.基金项目
The National Natural Science Foundation of Chiua(No.60676043).the National High Technology Research and Development Pro-gram of China(863 Program)(No.2007AA042328). （No.60676043）
