传感技术学报2001，Vol.14Issue(1)：59-63,5.
硅加速度计系统设计技术
The System Design Technology of Silicon Accelerometer
摘要
Abstract
By introducing the design of the force-balance silicon accelerometer,this paper describes the ideas and methods of the MEMS products. The effective links of the micro-structure and the electronics which are interdependent ensures the final performance of the whole system. So it is the design rule of a hybrid system that considers in system and designs in double.关键词
硅加速度计/系统设计分类
信息技术与安全科学引用本文复制引用
彭勃,王璐,陈雪冬..硅加速度计系统设计技术[J].传感技术学报,2001,14(1):59-63,5.
