半导体学报2009,Vol.30Issue(7):60-64,5.DOI:10.1088/1674-4926/30/7/074006
A simple method of measuring differentially-excited on-wafer spiral inductor-like components
A simple method of measuring differentially-excited on-wafer spiral inductor-like components
Pan Jie 1Yang Haigang 2Yang Liwu3
作者信息
- 1. Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
- 2. Graduate University of the Chinese Academy of Sciences, Beijing 100049, China
- 3. RF Application Group, SMIC, Shanghai 201203, China
- 折叠
摘要
Abstract
mea-sured, and then comparisons between simulated and measured electromagnetic results are performed to verify this method.关键词
on-wafer/differentially-excited/de-embedding/two-port network/S-parameterKey words
on-wafer/differentially-excited/de-embedding/two-port network/S-parameter引用本文复制引用
Pan Jie,Yang Haigang,Yang Liwu..A simple method of measuring differentially-excited on-wafer spiral inductor-like components[J].半导体学报,2009,30(7):60-64,5.