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A simple method of measuring differentially-excited on-wafer spiral inductor-like components

Pan Jie Yang Haigang Yang Liwu

半导体学报2009,Vol.30Issue(7):60-64,5.
半导体学报2009,Vol.30Issue(7):60-64,5.DOI:10.1088/1674-4926/30/7/074006

A simple method of measuring differentially-excited on-wafer spiral inductor-like components

A simple method of measuring differentially-excited on-wafer spiral inductor-like components

Pan Jie 1Yang Haigang 2Yang Liwu3

作者信息

  • 1. Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
  • 2. Graduate University of the Chinese Academy of Sciences, Beijing 100049, China
  • 3. RF Application Group, SMIC, Shanghai 201203, China
  • 折叠

摘要

Abstract

mea-sured, and then comparisons between simulated and measured electromagnetic results are performed to verify this method.

关键词

on-wafer/differentially-excited/de-embedding/two-port network/S-parameter

Key words

on-wafer/differentially-excited/de-embedding/two-port network/S-parameter

引用本文复制引用

Pan Jie,Yang Haigang,Yang Liwu..A simple method of measuring differentially-excited on-wafer spiral inductor-like components[J].半导体学报,2009,30(7):60-64,5.

半导体学报

OA北大核心CSCDCSTPCDEI

1674-4926

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