光学精密工程2005，Vol.13Issue(5)：620-625,6.
Manufacturing and testing of X-ray imaging components with high precision
Manufacturing and testing of X-ray imaging components with high precision
摘要
Abstract
In the latest 20 years, X-ray imaging technology has developed rapidly in order to meet the needs of X-ray photo-etching,spatial exploration technology, high-energy physics, procedure diagnosis of ICF,etc. Since refractive indices of materials in the X-ray region are lower than 1, and X-ray is strongly absorbed by materials, the characteristics of X-ray increase greatly difficulty to obtain X-ray image. Conventional imaging methods are hardly suitable to X-ray range. In general, grazing reflective imaging and coding aperture imaging methods have been adopted more and more.We have designed a non-coaxial grazing reflective X-ray microscope which is composed of four spherical mirrors, in order to satisfy the requirement of the diagnosis of inertial confinement fusion (ICF). The four mirrors have the same radius of curvature. The radius of each mirror is 29 000 mm and the aperture is 30 mm×15 mm. Allowable tolerance of the radius is ≤0.2% and one of surface roughness (rms) is ≤0.6 nm. Evidently it is very difficult to fabricate and test such mirrors. In order to obtain eligible mirrors, we choose 18 mirror roughcasts and array them on a round disk according to format. The combined manufacturing method can ensure high accordant quality. The fabricated mirrors are tested by both templet and double round aperture methods. Radius errors of the mirrors is about 53 mm. The surface roughness (rms) of the mirrors is inspected by the relative interferometric equipment (WYKO) and atomic force microscope. Before and after coating the measured surface roughness is averagely 0.52 nm and 0.4 nm, respectively.关键词
X-ray imaging/quality evaluation/manufacturing and testing/nanometer precision/nanometer componentKey words
X-ray imaging/quality evaluation/manufacturing and testing/nanometer precision/nanometer component分类
数理科学引用本文复制引用
HU Jia-sheng,WU Xü..Manufacturing and testing of X-ray imaging components with high precision[J].光学精密工程,2005,13(5):620-625,6.基金项目
National high-tech research and development program of China(863 Program No.2004 AA843170) （863 Program No.2004 AA843170）
