半导体学报2002，Vol.23Issue(6)：632-636,5.
一种新颖结构紧凑的AWG器件
A Novel Compact-Structure Arrayed-Waveguide Grating Device
摘要
Abstract
Arrayed-waveguide grating (AWG) device,a novel compact-structure,is presented based on silicon-on-insulator (SOI) material.A total internal reflection (TIR) waveguide mirror is fabricated at the middle of each arrayed waveguide.An approach of compensating TE-TM mode polarization is presented by using the phase difference,which is caused by TIR at the waveguide mirror.This AWG device has advantage for its small size and simple technigue of fabrication.The experimental results are given and the feasibility of fabrication is tested.关键词
列阵波导光栅(AWG)/密集波分复用(DWDM)/波导镜/偏振补偿PACC:4280L/5270G/4280S/4282Key words
AWG/DWDM/waveguide mirror/polarization compensation分类
信息技术与安全科学引用本文复制引用
江晓清,李柏阳,杨建义,王明华..一种新颖结构紧凑的AWG器件[J].半导体学报,2002,23(6):632-636,5.基金项目
国家重点基础研究发展规划项目(编号:G1999033104)及教育部高校骨干教师基金资助项目 （编号:G1999033104）
