东南大学学报（英文版）2009，Vol.25Issue(1)：63-67,5.
一种新型的闭环真空硅微陀螺仪
A novel closed-loop vacuum silicon microgyroscope
摘要
Abstract
A novel closed-loop control strategy of a silicon micro- gyroscope(SMG)is proposed.The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa.Its quality factor reaches greater than 10 000.Self-oscillating and closed-loop methods based on electrostatic force feedback are adopted in both measure and control circuits.Both single side driving and sensing methods are used to simplify the drive circuit.These dual channel decomposition and reconstruction closed loops are applied in sense modes.The testing results demonstrate that useful signals and guadrature signals do not interact with each other because of the decoupling of their phases.Under the condition of a scale factor of 9.6zero bias stability reaches 28(°)/h with a nonlinear coefficient of 400×10-6 and a simulated bandwidth of more than 100 Hz.The overall performance is improved by two orders of magnitude in comparison to that at atmospheric pressure.关键词
硅微陀螺仪/自激振荡/双闭环检测/标度因素/零偏稳定性Key words
silicon micro-gyroscope(SMG)/self oscillating/dual-charmel closed-loop detection/scale factor/zero bias stability分类
交通工程引用本文复制引用
夏敦柱,王寿荣,周百令..一种新型的闭环真空硅微陀螺仪[J].东南大学学报（英文版）,2009,25(1):63-67,5.基金项目
The National High Technology Research and Develop-ment Program of China(863 Program)(No.2002AA812038),the National Delense Pre-Research Support Program(No.41308050109). （863 Program）
