半导体学报2006，Vol.27Issue(4)：662-666,5.
表面镀铜悬浮厚单晶硅螺线MEMS电感
MEMS Inductor Consisting of Suspended Thick Crystalline Silicon Spiral with Copper Surface Coating
摘要
Abstract
A novel MEMSinductor consisting of a planar single crystalline silicon spiral with a copper surface coating as the conductor is presented. Using a silicon-glass anodic bonding and deep etching formation-and-release process,a 40μ m-thick silicon spiral is formed, which is suspended on a glass substrate to eliminate substrate loss.The surfaces of the silicon spiral are coated with highly conformal copper by electroless plating to reduce the resistive loss in the conductor,with thin nickel film plated on the surface of the copper layer for final surface passivation. The fabricated inductor exhibits a self-resonance frequency higher than 15GHz, with a quality factor of about 40 and an inductance of over 5nH at 11.3GHz. Simulations based on a compact equivalent circuit model of the inductor and parameter extraction using a characteristic-function approach are carried out, and good agreement with measurements is obtained.关键词
MEMS电感/悬浮螺线/表面镀铜/品质因子/建模与参数提取/射频Key words
MEMS inductor/suspended spiral/copper coating/quality factor/modeling and parameter extraction/radio frequency分类
信息技术与安全科学引用本文复制引用
吴文刚,李轶,黄风义,韩翔,张少勇,李志宏,郝一龙..表面镀铜悬浮厚单晶硅螺线MEMS电感[J].半导体学报,2006,27(4):662-666,5.基金项目
国家自然科学基金资助项目(批准号:90307007)Project supported by the National Natural Science Foundation of China(No. 90307007) （批准号:90307007）
