人工晶体学报2004，Vol.33Issue(4)：679-682,4.
离子轰击增强金刚石膜与Si衬底结合力的进一步研究
Further Study on Improvement of Adhesive Force of Diamond Films with Si Substrates by Ion Bombardment
徐幸梓 1刘天模 1曾丁丁 1张兵 2刘凤艳2
作者信息
- 1. 重庆大学材料科学与工程学院,重庆400044
- 2. 北京工业大学应用数理学院,北京100022
- 折叠
摘要
Abstract
Owing to the large surface energy difference of diamond with silicon, the diamond nucleation on the mirror-polished silicon surface is difficult when diamond films are prepared by chemical vapor deposition. However, the nucleation can be enhanced by a negative substrate bias, indicating that the adhesive force of diamond nuclei on Si surface is improved. The ion bombardment results in a production of micro-defects(pits)on Si substrate surface and therefore the contact area of diamond film with Si surface is enlarged. Based on these results, the influence of ion bombardment on Si surface with the negative bias was analyzed and the effect of ion bombardment on the adhesive force between diamond film and Si substrate was theoretically studied.关键词
金刚石膜/离子轰击/凹坑/结合力Key words
diamond film/ion bombardment/pits/adhesive force分类
数理科学引用本文复制引用
徐幸梓,刘天模,曾丁丁,张兵,刘凤艳..离子轰击增强金刚石膜与Si衬底结合力的进一步研究[J].人工晶体学报,2004,33(4):679-682,4.
