人工晶体学报2004，Vol.33Issue(4)：683-689,7.
直流等离子体喷射制备无裂纹自支撑金刚石膜体的晶体组织设计
Design of Crystalline Structure for Crack-free Self-standing Diamond Film by DC Plasma Jet
摘要
Abstract
Crack patterns in self-standing diamond film were observed as network-shape pattern, river-shape and circle-shape pattern, depending on growth temperature. Fracture mechanism was firstly studied by atomic force microscope (AFM) on the fractured section. Both intergranular fracture and transgranular fracture were found by this technique. Transgranular fracture was easy to observe in network-shape pattern, and intergranular fracture was found in circle-shape pattern. The river-shape pattern seemed to result from the combination of inter- and trans-granular fracture. X-ray diffraction (XRD) test was done on all of growth side, nucleation side and fractured section of the film body. Corresponding to XRD results, transgranular fracture took place in the film with (111)-crystalline surface being dominant in all of the three detected surfaces. Intergranular fracture occurred in the film with (220)-crystalline surface being dominant in all of the three detected surfaces. Raman test showed that the intrinsic stress was in the range of several tens MPa to several hundreds MPa. Micro-Raman test on fractured section indicated that there was the distribution of stress in the film body. Also by micro-Raman, testing along the crack path indicated that crystalline structure with few defects was benefit for blocking the propagation of crack. A mechanical model was set up to analyze the effect of dominant surface on fracture strength. Based on the experimental results and mechanical analysis, crack-free self-standing diamond films with 2mm in thickness and 120mm in diameter were successfully grown by controlling the crystalline structure of the films.关键词
金刚石膜/无裂纹/晶体结构/直流等离子体喷射Key words
diamond film/crack-free/crystalline structure/DC plasma jet分类
数理科学引用本文复制引用
陈广超,周祖源,周有良,杨胶溪,李成明,宋建华,佟玉梅,唐伟忠,吕反修..直流等离子体喷射制备无裂纹自支撑金刚石膜体的晶体组织设计[J].人工晶体学报,2004,33(4):683-689,7.基金项目
Project supported by 863 Program (2002AA305508),Beijing Novel Project(No.2003A13)and SRF for ROCS,SEM （2002AA305508）
