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An improved fabrication method for carbon nanotube probe

XU Zong-wei GUO Li-qiu DONG Shen ZHAO Qing-liang

哈尔滨工业大学学报(英文版)2008,Vol.15Issue(5):690-693,4.
哈尔滨工业大学学报(英文版)2008,Vol.15Issue(5):690-693,4.

An improved fabrication method for carbon nanotube probe

An improved fabrication method for carbon nanotube probe

XU Zong-wei 1GUO Li-qiu 2DONG Shen 3ZHAO Qing-liang1

作者信息

  • 1. Precision Engineering Research Institute,Harbin Institute of Technology,Harbin 150001,China
  • 2. State Key Laboratory of Precision Measuring Technology & Instruments,Tianjin University,Tianjin 300072,China
  • 3. School of Mechanical Engineering,Tsinghua University,Beijing 100084,China
  • 折叠

摘要

Abstract

An improved arc discharge method is developed to fabricate the carbon nanotube probe.In this method,the silicon probe and the carbon nanotube were manipulated under an optical microscope.When the silicon probe and the carbon nanotube were very close,30-60 V dc or ac was applied between them,and the carbon nanotube was divided and attached to the end of the silicon probe.Comparing with the arc discharge method,the new method need not coat the silicon probe with metal in advance,which Can greatly reduce the fabrication difficulty and cost.The fabricated carbon nanotube probe exhibits the good property of hish aspect ratio and can reflect the true topography more accurately than the silicon probe.

关键词

carbon nanotube(CNT)/atomic force microscope(AFM)/probe/fabrication

Key words

carbon nanotube(CNT)/atomic force microscope(AFM)/probe/fabrication

分类

机械制造

引用本文复制引用

XU Zong-wei,GUO Li-qiu,DONG Shen,ZHAO Qing-liang..An improved fabrication method for carbon nanotube probe[J].哈尔滨工业大学学报(英文版),2008,15(5):690-693,4.

基金项目

Sponsored by the National Natural Science Foundation of China(Grant No.50205006). (Grant No.50205006)

哈尔滨工业大学学报(英文版)

1005-9113

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