电子器件2001，Vol.24Issue(1)：72-78,7.
SOI技术的机遇和挑战
The Opportunity and Challenge of SOI Technology
摘要
Abstract
The potential advantages and shortcomings of SOI technology wer discussed in detail in this paper. The trends of developing CMOS/SOI integrated circuits and SOI materials are presented also. At last, the conclusion which the CMOS/SOI technology will become the main technology of IC when the dimension is smaller than 0.1 micron and the supply voltage is lower than 1 voltage is given.
关键词
SOI技术/CMOS/集成电路分类
信息技术与安全科学引用本文复制引用
徐文华,张天义,汪红梅,张兴..SOI技术的机遇和挑战[J].电子器件,2001,24(1):72-78,7.
