传感技术学报2007，Vol.20Issue(4)：735-737,3.
基于昆虫毛状感触器的微型流速传感器有限元模拟分析
Finite Element Analysis of Low-Velocity Gas Flow Microsensor Based on Trichoid Sensillum of Insects
陈健 1陈德勇 1王军波1
作者信息
- 1. 中国科学院电子学研究所传感技术国家重点实验室,北京,100080
- 折叠
摘要
Abstract
A new biomimetic microsensor modeled on trichoid sensillum of insects which can detect low velocity gas flow is demonstrated. The principle of trichoid sensillum and designed biomimetic microsensor has been proposed. FEA(Finite Element Analysis) simulation is conducted in which interaction between fluid domain and structural domain is taken into consideration to evaluate this design.. Boundary conditions and dimension choice of fluid model has been put forward. Result of FEA simulation asserts that there exists excellent linear relationship between relatively low velocity and strain in the micro domain. What is more, the effect of different sizes of cantilever-based thin film on the output of microsensor has been explored too.关键词
微机械电子系统/仿生传感器/有限元模拟/微尺度低速气体流动/应变片Key words
MEMS/Biomimetic Sensor/FEA simulation/low velocity gas flow in micro-domain/strain gauge分类
信息技术与安全科学引用本文复制引用
陈健,陈德勇,王军波..基于昆虫毛状感触器的微型流速传感器有限元模拟分析[J].传感技术学报,2007,20(4):735-737,3.
