光学精密工程2006，Vol.14Issue(5)：749-753,5.
光栅平动式光调制器光学特性分析
Optical characteristic analysis of grating moving light modulator
摘要
Abstract
This paper presents a novel grating moving light modulator based on Micro Optical Electromechanical System(MOEMS) technology and introduces its structure,operation principle and fabrication process. The device can be used in projection display etc. The relationship between optical characteristics and geometrical parameters of this device is established through optical analysis, optimization and simulation,and the ±1st order diffraction efficiency η and contrast V are theoretically 37.0% and 625 respectively for e=0.5,d=6 μm,L=39 μm,w=36 μm,w0=1.5 μm and e,d,L,w and w0 are occupation ratio,grating constant, length,width and margin of the movable grating respectively, the gap between the movable grating and the underlying reflector are 0.65 μm and 0.78 μm respectively in on and off states, and the single pixel size of the device is 51 μm×51 μm.关键词
微光机电系统/空间光调制器/光栅衍射/光学分析/仿真Key words
Micro Optical Electromechanical System(MOMES)/spatial light modulator/grating diffraction/optical analysis/simulation分类
信息技术与安全科学引用本文复制引用
黄尚廉,闫许,张洁,张智海,付红桥..光栅平动式光调制器光学特性分析[J].光学精密工程,2006,14(5):749-753,5.基金项目
Supported by Academic Foundation of Chongqing(No.8272),National Natural Science Foundation of China(No.60578023). （No.8272）
