无机材料学报2001，Vol.16Issue(1)：81-86,6.
氮气氛下金刚石薄膜生长过程中的光发射谱研究
Optical Emission Spectroscopy for Hot Filament Diamond Growth Process with Nitrogen Addition
李灿华 1廖源 2常超 2王冠中 2马玉蓉 2方容川2
作者信息
- 1. 中国科技大学物理系
- 2. 中国科技大学物理系,
- 折叠
摘要
Abstract
Optical emission spectra were applied to detect the chemical radicals in the system. It is shown that the additional nitrogen makes the chemical radicals and surface activity of diamond films change tremendously. Nitrogenous species abstract the atomic hydrogen on the diamond surface and speed up the desorption rate of H, so as to promote the diamond films deposition. Further more, the selective absorption of nitrogenous species causes the (100) facets chemical roughening, which makes the growth rate of (100) facet higher than that of other facets and leads to the presence of (100) textured diamond films. The effects of nitrogen addition in CH4/H2 gas mixtures on morphology, quality and growth 妑ate of polycrystalline diamond films prepared by hot filament chemical vapor deposition (HFCVD) were also studied. The results agree with the analysis of theoptical emission spectra.关键词
热丝CVD/光发射谱/含氮基团/金刚石生长分类
数理科学引用本文复制引用
李灿华,廖源,常超,王冠中,马玉蓉,方容川..氮气氛下金刚石薄膜生长过程中的光发射谱研究[J].无机材料学报,2001,16(1):81-86,6.
