半导体学报2008，Vol.29Issue(5)：893-897,5.
太赫兹Si/SiGe量子级联激光器波导模拟
Waveguide Simulation of a THz Si/SiGe Quantum Cascade Laser
摘要
Abstract
The waveguide design is one of the most important parts in a terahertz quantum cascade laser(QCL). Si/SiGeQCL waveguides, based on the Drude model and finite-difference time-domain (FDTD) method, are designed by the tradi-tional refractive index waveguide structure, the single-sided metal structure, the double-metal clad structure, and a novelmetal/metal silicide structure. The metal/metal silicide structure, showing high modal confinement,is convenient in processengineering and is expected to be a viable waveguide solution for Si/SiGe QCLs in the THz range.关键词
太赫兹/Si/SiGe/量子级联激光器/波导Key words
terahertz/ Si/SiGe/ quantum cascade laser/ waveguide分类
电子信息工程引用本文复制引用
陈锐,林桂江,陈松岩,李成,赖虹凯,余金中..太赫兹Si/SiGe量子级联激光器波导模拟[J].半导体学报,2008,29(5):893-897,5.基金项目
Project supported by the National Natural Science Foundation of China (Nos. 50672079,60576001,60676027) and the State Key Development Program for Basic Research of China (No.2007CB613400) （Nos. 50672079,60576001,60676027）
国家自然科学基金(批准号:50672079，60576001，60676027)和国家重点基础研究发展规划(批准号:2007CB613400)资助项目 （批准号:50672079，60576001，60676027）
