半导体学报2004，Vol.25Issue(8)：894-897,4.
使用低能离子注入导致的量子阱混杂方法制作可集成的分布式Bragg反射激光器
An Integratable Distributed Bragg Reflector Laser by Low-Energy Ion Implantation Induced Quantum Well Intermixing
摘要
Abstract
An integratable distributed Bragg reflector laser is fabricated by low-energy ion implantation induced quantum well intermixing. A 4.6nm quasi-continuous wavelength tuning range is achieved by controlling phase current and grating current simultaneously,and side mode suppression ratio maintains over 30dB throughout the tuning range except a few mode jump points.关键词
光子集成回路/分布式Bragg反射激光器/量子阱混杂/波长调谐Key words
photonic integrated circuit/distributed Bragg reflector laser/quantum well intermixing/wavelength tuning分类
信息技术与安全科学引用本文复制引用
张靖,陆羽,赵玲娟,周帆,王宝军,王鲁峰,王圩..使用低能离子注入导致的量子阱混杂方法制作可集成的分布式Bragg反射激光器[J].半导体学报,2004,25(8):894-897,4.基金项目
国家高技术研究发展计划(批准号:2002AA312150)及国家重点基础研究发展规划(批准号:G20000683-1)资助项目 （批准号:2002AA312150）
