半导体学报2005，Vol.26Issue(5)：899-903,5.
一种利用PDMS工艺解决SU-8去胶问题的方法
An Alternative Method for SU-8 Removal Using PDMS Technique
摘要
Abstract
An alternative method for SU-8 removal is proposed. Instead of directly using SU-8 microstructure as the electroplating mold, a polydimethysiloxane (PDMS) replica is employed. The metallic micromold insert obtained through this method can be easily peeled off from the PDMS replica,meanwhile with high resolution and smooth surfaces.关键词
SU-8去胶/电铸/PDMS/金属模具/高深宽比微结构Key words
SU-8 removal/electroplating/PDMS/micromold insert/high-aspect-ratio microstructures分类
信息技术与安全科学引用本文复制引用
李建华,陈迪,张金娅,刘景全,朱军..一种利用PDMS工艺解决SU-8去胶问题的方法[J].半导体学报,2005,26(5):899-903,5.基金项目
国家高技术研究发展计划资助项目(批准号:200211404150) （批准号:200211404150）
