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A New Self-assembly Metal CMG Discriminator by Multi-exposure LiGA Like Process and Sacrificial Layer Process

东华大学学报（英文版）2005，Vol.22Issue(4)：91-93,3.

A New Self-assembly Metal CMG Discriminator by Multi-exposure LiGA Like Process and Sacrificial Layer Process

作者信息

1. Key Laboratory for Thin File and Micro fabrication Technology of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai J iaotong University, Shanghai 200030;Key Laboratory for Thin File and Micro fabrication Technology of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai J iaotong University, Shanghai 200030;Key Laboratory for Thin File and Micro fabrication Technology of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai J iaotong University, Shanghai 200030;Key Laboratory for Thin File and Micro fabrication Technology of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai J iaotong University, Shanghai 200030;Key Laboratory for Thin File and Micro fabrication Technology of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai J iaotong University, Shanghai 200030
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摘要

Abstract

The counter-meshing gears (CMG) discriminator is amechanically ceded lock, which is used to prevent the occurrenceof High Censequence Events. Tnis paper advanced a new kind of self- asesembly metal CMG discriminator based on multi-exposure LiGA like process and sacrificial layer process. The new CMG discriminator has the followingcharacters except low cost: 1) it has only diserimination teeth sectins; 2) the thickness of each gear layer exceedsone hundred micrometers; 3) it is axially driven by a separate electronic magnetic micromotor direetly; 4) its CMG is made of metal and is batch fabricated in theassembled state; 5) it is prevented from rotating in the opposite direction by pawl/ratchet wheel mechanism; 6) it has simpler structure. This device has better strength and reliability in abnormal environment comppared to the existing surface micro machining (SMM) discriminator.

关键词

Counter-meshing gears (CMG) discriminator/multi-exposure LiGA like process/sacrificial layer process

Key words

Counter-meshing gears (CMG) discriminator/multi-exposure LiGA like process/sacrificial layer process

分类

矿业与冶金

引用本文复制引用

..A New Self-assembly Metal CMG Discriminator by Multi-exposure LiGA Like Process and Sacrificial Layer Process[J].东华大学学报（英文版）,2005,22(4):91-93,3.

基金项目

This Work is Supported by High Technology Research and Development Program of China (2003AA404210、 2005AA404250)and Science and Technology Research Program of Ministry of Education of China(importance 0307) （2003AA404210、 2005AA404250）

东华大学学报（英文版）

ISSN：1672-5220

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