光学精密工程2000，Vol.8Issue(1)：91-95,5.
同心圆光栅二自由度误差测量系统
A two-degree-of-freedom measuring system based on concentric-circle gratings
朱建忠 1李宁 1李圣怡1
作者信息
- 1. 国防科技大学机电工程及自动化学院,湖南,长沙,410073
- 折叠
摘要
Abstract
A method is presented for ultra-precision two-degree-of-freedom measurem ent (TDFM) based on image processing of interferential fringes in real time, which a re generated by three concentric-circle gratings and captured by CCD (Charge co u pled Device) camera. The basic measuring principles are described in this paper including the generation of Moiré fringes of concentric-circle gratings, three - grating-system, imaging optics, and the method of image processing. The ac t ual measuring system is analyzed and calibrated through experiments and the meas urement results are compared with laser interferometer system. Test shows that t his system can be adopted to on-line measurement and compensation of ultra-pre ci sion process. It has a long measuring range of 200mm and can measure two dimensi onal error components at the same time with an accuracy of better than 0.1μm.关键词
同心圆光栅/莫尔条纹/图像处理/CCD/二 自由度误差测量Key words
concentric-circle grating/Moiré/fringe/image processing/CCD/two-de gree-of-freedom measurement(TDFM)分类
数理科学引用本文复制引用
朱建忠,李宁,李圣怡..同心圆光栅二自由度误差测量系统[J].光学精密工程,2000,8(1):91-95,5.
