半导体学报2006，Vol.27Issue(6)：982-987,6.
0.13μm CMOS上接地板宽度有限共面波导的特性与建模
Characterization and Modeling of Finite-Ground Coplanar Waveguides in 0. 13μm CMOS
摘要
Abstract
We discuss the characterization and modeling of coplanar waveguides (CPW) realized in TSMC 0. 13μm CMOS process. EM-field simulations with momentum are performed to estimate the important parameters of the transmission lines, such as characteristic impedance and propagation loss. Coplanar waveguide libraries are designed with Z values of 30,50,70, and 100Ω. Finally, the propagation constant and the characteristic impedance are measured in a frequency range from 0. 1 to 40GHz with a vector-network analyzer,using the short-open-loadthru (SOLT) de-embedding technique. The distributed parameters of the CPWs are extracted from the measured S-parameters.关键词
共面波导/CMOS/散射参数Key words
coplanar waveguide/CMOS/S-parameter分类
信息技术与安全科学引用本文复制引用
陈勖,王志功..0.13μm CMOS上接地板宽度有限共面波导的特性与建模[J].半导体学报,2006,27(6):982-987,6.基金项目
台湾地区TSMC公司器件建模资助项目Project supported by Chinese Taiwan TSMC Semiconductor Manufacturing Co. ,LTD （）
