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An MWCNT-doped SnO_2 thin film NO_2 gas sensor by RF reactive magnetron sputtering

Lin Wei Huang Shizhen Chen Wenzhe

半导体学报2010，Vol.31Issue(2)：23-28,6.

半导体学报2010，Vol.31Issue(2)：23-28,6.DOI:10.1088/1674-4926/31/2/024006

Lin Wei ¹Huang Shizhen ²Chen Wenzhe³

作者信息

1. College of Material Science and Engineering, Fuzhou University, Fuzhou 350002, China
2. College of Physics and Information Engineering, Fuzhou University, Fuzhou 350002, China
3. Fujian Key Laboratory of Microelectronics and Integrated Circuits, Fuzhou 350002
折叠

SnO_2/multi-walled carbon nanotube/RF reactive magnetron sputtering/NO_2 sensor

SnO_2/multi-walled carbon nanotube/RF reactive magnetron sputtering/NO_2 sensor

Lin Wei,Huang Shizhen,Chen Wenzhe..An MWCNT-doped SnO_2 thin film NO_2 gas sensor by RF reactive magnetron sputtering[J].半导体学报,2010,31(2):23-28,6.

Project supported by the National High Technology Research and Development Program of China (No. 2007AA03Z325). （No. 2007AA03Z325）

OA北大核心CSCDCSTPCDEI

ISSN：1674-4926

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