半导体学报2010,Vol.31Issue(8):42-44,3.DOI:10.1088/1674-4926/31/8/083005
Low-temperature deposition of transparent conducting Mn-W co-doped ZnO thin films
Low-temperature deposition of transparent conducting Mn-W co-doped ZnO thin films
摘要
关键词
Mn-W co-doped ZnO films/transparent conducting films/magnetron sputtering/sputtering powerKey words
Mn-W co-doped ZnO films/transparent conducting films/magnetron sputtering/sputtering power引用本文复制引用
Zhang Huafu,Liu Hanfa,Lei Chengxin,Zhou Aiping,Yuan Changkun..Low-temperature deposition of transparent conducting Mn-W co-doped ZnO thin films[J].半导体学报,2010,31(8):42-44,3.基金项目
Project supported by the Natural Science Foundation of Shandong Province,China (No.ZR2009GQ011). (No.ZR2009GQ011)