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Low-temperature deposition of transparent conducting Mn-W co-doped ZnO thin films

Zhang Huafu Liu Hanfa Lei Chengxin Zhou Aiping Yuan Changkun

半导体学报2010,Vol.31Issue(8):42-44,3.
半导体学报2010,Vol.31Issue(8):42-44,3.DOI:10.1088/1674-4926/31/8/083005

Low-temperature deposition of transparent conducting Mn-W co-doped ZnO thin films

Low-temperature deposition of transparent conducting Mn-W co-doped ZnO thin films

Zhang Huafu 1Liu Hanfa 1Lei Chengxin 1Zhou Aiping 1Yuan Changkun1

作者信息

  • 1. School of Science,Shandong University of Technology,Zibo 255049,China
  • 折叠

摘要

关键词

Mn-W co-doped ZnO films/transparent conducting films/magnetron sputtering/sputtering power

Key words

Mn-W co-doped ZnO films/transparent conducting films/magnetron sputtering/sputtering power

引用本文复制引用

Zhang Huafu,Liu Hanfa,Lei Chengxin,Zhou Aiping,Yuan Changkun..Low-temperature deposition of transparent conducting Mn-W co-doped ZnO thin films[J].半导体学报,2010,31(8):42-44,3.

基金项目

Project supported by the Natural Science Foundation of Shandong Province,China (No.ZR2009GQ011). (No.ZR2009GQ011)

半导体学报

OA北大核心CSCDCSTPCDEI

1674-4926

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