半导体学报2010,Vol.31Issue(8):93-97,5.DOI:10.1088/1674-4926/31/8/084011
A novel closed-form resistance model for trapezoidal interconnects
A novel closed-form resistance model for trapezoidal interconnects
摘要
关键词
interconnect/resistance/Levenberg-Marquardt methodKey words
interconnect/resistance/Levenberg-Marquardt method引用本文复制引用
Chen Baojun,Tang Zhen'an,Yu Tiejun..A novel closed-form resistance model for trapezoidal interconnects[J].半导体学报,2010,31(8):93-97,5.基金项目
Project supported by the National Natural Science Foundation of China(No.90607003). (No.90607003)