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A novel closed-form resistance model for trapezoidal interconnects

Chen Baojun Tang Zhen'an Yu Tiejun

半导体学报2010,Vol.31Issue(8):93-97,5.
半导体学报2010,Vol.31Issue(8):93-97,5.DOI:10.1088/1674-4926/31/8/084011

A novel closed-form resistance model for trapezoidal interconnects

A novel closed-form resistance model for trapezoidal interconnects

Chen Baojun 1Tang Zhen'an 2Yu Tiejun1

作者信息

  • 1. School of Electronic Science and Technology,Dalian University of Technology,Dalian 116023,China
  • 2. School of Electronics and Information Engineering,Dalian Jiaotong University,Dalian 116028,China
  • 折叠

摘要

关键词

interconnect/resistance/Levenberg-Marquardt method

Key words

interconnect/resistance/Levenberg-Marquardt method

引用本文复制引用

Chen Baojun,Tang Zhen'an,Yu Tiejun..A novel closed-form resistance model for trapezoidal interconnects[J].半导体学报,2010,31(8):93-97,5.

基金项目

Project supported by the National Natural Science Foundation of China(No.90607003). (No.90607003)

半导体学报

OA北大核心CSCDCSTPCDEI

1674-4926

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