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Characteristics of a novel biaxial capacitive MEMS accelerometer

Dong Linxi Li Yongjie Yan Haixia Sun Lingling

半导体学报2010，Vol.31Issue(5)：63-68,6.

半导体学报2010，Vol.31Issue(5)：63-68,6.DOI:10.1088/1674-4926/31/5/054006

Characteristics of a novel biaxial capacitive MEMS accelerometer

Dong Linxi ¹Li Yongjie ²Yan Haixia ¹Sun Lingling³

作者信息

1. Key Laboratory ofRF Circuits and System of Ministry of Education,Hangzhou Dianzi University,Hangzhou 310018,China
2. State Key Laboratory of Transducer Technology,Chinese Academy of Sciences,Shanghai 200050,China
3. Toshiba Hydro-Electro Equipments Company,Hangzhou 311504,China
折叠

摘要

关键词

MEMS/biaxial accelerometer/capacitor fringe effect/slide-film damping

Key words

MEMS/biaxial accelerometer/capacitor fringe effect/slide-film damping

引用本文复制引用

Dong Linxi,Li Yongjie,Yan Haixia,Sun Lingling..Characteristics of a novel biaxial capacitive MEMS accelerometer[J].半导体学报,2010,31(5):63-68,6.

基金项目

Project supported by the National Natural Science Foundation of China (No.60506015) and the Zbejiang Provincial Natural Science Foundation of China (No.Y107105). （No.60506015）

半导体学报

OA北大核心CSCDCSTPCDEI

ISSN：1674-4926

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