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Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

Qin Zhengkun He Fei Liu Chunling Wang Lizhong Ma Chunsheng

半导体学报2010，Vol.31Issue(7)：29-31,3.

半导体学报2010，Vol.31Issue(7)：29-31,3.DOI:10.1088/1674-4926/31/7/074004

Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

Qin Zhengkun ¹He Fei ²Liu Chunling ¹Wang Lizhong ¹Ma Chunsheng¹

作者信息

1. College of Information and Technology,Jinlin Normal University,Siping 136000,China
2. State Key Laboratory of Integrated Optoelectronics,Changchun 130012,China
折叠

摘要

关键词

arrayed waveguide grating/flat spectral response/steam-redissolution/3-dB bandwidth/crosstalk

Key words

arrayed waveguide grating/flat spectral response/steam-redissolution/3-dB bandwidth/crosstalk

引用本文复制引用

Qin Zhengkun,He Fei,Liu Chunling,Wang Lizhong,Ma Chunsheng..Fabrication of 17 × 17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique[J].半导体学报,2010,31(7):29-31,3.

基金项目

Project supported by the National Natural Science Foundation of China (No. 60576045). （No. 60576045）

半导体学报

OA北大核心CSCDCSTPCDEI

ISSN：1674-4926

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