人工晶体学报2011，Vol.40Issue(1)：75-82,8.
直流弧光放电PCVD金刚石膜制备中基底控温系统的研制与应用
Design and Application of Substrate Temperature Control System in DC Arc Discharge PCVD Diamond Films Device
摘要
Abstract
A temperature auto control system had been developed for a substrate holder apparatus on the basis of the DC arc discharge plasma CVD growth system. The CVD diamond films were deposited by DC arc discharge plasma using the novel technique above mentioned. The morphology and quality of diamond films were analyzed by scanning electron microscopy (SEM) and laser Raman spectroscopy. The results showed that the system is steady, the quality of diamond films is improved using substrate temperature control system, and has very broad applicable prospect关键词
直流弧光放电/等离子体CVD/金刚石薄膜/基底托架/温度自动控制Key words
DC arc discharge/ plasma chemical vapor deposition/ diamond films/ substrate holder/substrate temperature control分类
信息技术与安全科学引用本文复制引用
张湘辉,汪灵,龙剑平..直流弧光放电PCVD金刚石膜制备中基底控温系统的研制与应用[J].人工晶体学报,2011,40(1):75-82,8.基金项目
国家自然科学基金(50974025,40572030) （50974025,40572030）
四川省科技厅重点科技攻关项目(05GG021-001) （05GG021-001）
四川省教育厅自然科学重点科研项目(2003A142) （2003A142）
国家公益性行业科学专项经费课题(201011005-5) （201011005-5）
四川省教育厅自然科学项目(07ZB009) （07ZB009）
